Mechanistic Study of Β-Ga2o3 Nitridation by RF Nitrogen Plasma for GaN HeteroepitaxyMatthew M. Landi,Frank P. Kelly,Riley E. Vesto,Kyekyoon KimJOURNAL OF APPLIED PHYSICS（2024）引用 0|浏览2AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
