Advanced Spectroscopic Methods for Probing In-Gap Defect States in Amorphous SiNx for Charge Trap Memory Applications

Hyun Don Kim,Minseon Gu,Kyu-Myung Lee, Hanyeol Ahn, Jinwoo Byun,Gukhyon Yon, Junghyun Beak, Hyeongjoon Lim, Jaemo Jung, Jaehyeon Park, Jwa Soon Kim, Haejoon Hahm, Soobang Kim, Won Ja Min,Moon Seop Hyun,Yun Chang Park,Gyungtae Kim,Yongsup Park,Moonsup Han,Eunjip Choi,Young Jun Chang

CURRENT APPLIED PHYSICS（2025）

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关键词

Silicon nitride,SiNx,Spectroscopic ellipsometry,Reflection electron energy loss spectroscopy,Charge trap flash memory

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