Quasi-visualizable Detection of Deep Sub-Wavelength Defects in Patterned Wafers by Breaking the Optical Form Birefringence

Jiamin Liu,Jinlong Zhu, Zhe Yu, Xianrui Feng, Zedi Li,Lei Zhong,Jinsong Zhang,Honggang Gu,Xiuguo Chen,Hao Jiang,Shiyuan Liu

INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING（2025）

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defect inspection,form birefringence breaking,high order difference,anisotropic illumination modes,deep-subwavelength sensitivity,defect classification

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