Terahertz On-wafer Mtrl Calibration Kits for Microelectronics Characterization
2024 49TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, IRMMW-THZ 2024（2024）
Key words
on-wafer calibration,multiline thru-reflect-line (mTRL),terahertz (THz) frequencies,heterojunction-bipolar-transistors (HBTs)
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