Enhancing Electrical and Thermal Property of Diamond-Based Ta2N Films Through Introducing a Ta Transition Layer

Hao Li,Yue Wang, Mingzhen Zhang,Jinlong Liu,Liangxian Chen,Puqing Jiang,Yuhang Yin,Chengming Li,Junjun Wei

VACUUM（2024）

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关键词

Diamond substrate,Tantalum nitride film,Ta transition layer,Temperature coefficient of resistance (TCR),Interfacial thermal conductance,Time-domain thermoreflectance (TDTR)

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