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Atomic Layer Deposition, Mechanical, Wear Resistance, and Optical Properties of (Cr1-Xalx)2o3 Films on Si (100).

Mahtab Salari Mehr,Lauri Aarik,Taivo Jogiaas,Aarne Kasikov,Loic Vidal,Jekaterina Kozlova,Karine Mougin

CERAMICS INTERNATIONAL（2024）

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Key words
Atomic layer deposition,Chromium oxide,Chromium aluminum oxide,Wear resistance,Mechanical properties,Optical properties
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