A Fully Automatic High-Resolution EUV Monochromator for EUV Metrology Applications
2024 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)（2024）
关键词
Monochromator,Extreme Ultraviolet,Applications In Metrology,Spectral Resolution,Optical Path,Noble Gas,kHz Repetition Rate,Spectral Calibration,Coherent Diffractive Imaging
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