Ultralow-Loss Silicon Nitride Microresonators Using Room-Temperature Sputtering
2024 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)（2024）
Key words
Sputtering,Silicon Nitride,Room-temperature Sputtering,Thermal Annealing,Reactive Sputtering,Film Thickness,Photonic Integrated Circuits,Photonic Circuits,Microring Resonators
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