Development of TiN/AlN-based Superconducting Qubit Components

Benedikt Schoof, Moritz Singer, Simon Lang, Harsh Gupta, Daniela Zahn, Johannes Weber,Marc Tornow

International Conference on Quantum Computing and Engineering（2024）

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Key words

Titanium Nitride,Aluminum Nitride,Josephson Junctions,Superconducting Resonators

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