Process Optimization for Waveguide Fabrication by Liftoff Processing in Layers Deposited by Pulsed Laser

A. Bernard, A. Peirera,R. Orobtchouk, Etienne Cleyet-Merle,Christian Grillet, N. Chauvin,S. Guy, Y. Guyot,A. Gassenq

INTEGRATED PHOTONICS PLATFORMS III（2024）

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Key words

Integrated optics,waveguide,pulsed laser deposition,processing,liftoff

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