Design and Fabrication of Silicon-based Light Extractors for NV Centers in Diamond
2024 Conference on Lasers and Electro-Optics (CLEO)（2024）
关键词
Nitrogen-vacancy Centers,Centers In Diamond,Nitrogen-vacancy Centers In Diamond,Total Reflection,Hydrofluoric,Electron Beam Lithography,Electron Beam Evaporation,High Refractive Index,Increased Surface Roughness,Beam Quality,Silicon Photonics,Peculiar Shape,Diamond Surface,Buffered Oxide Etchant
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