Highly-Selective Etching of Micro-Transfer-Printed Thin-Film Lithium Niobate for Low Coupling Losses
2024 Conference on Lasers and Electro-Optics (CLEO)（2024）
关键词
Thin Films,Etching,Thin-film Lithium Niobate,Selective Etching,Waveguide,Wet Etching,Silicon Photonics
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