Wafer-Scale Fabrication of InGaP-on-Insulator for Nonlinear Quantum Photonics Applications
2024 Conference on Lasers and Electro-Optics (CLEO)（2024）
关键词
Nonlinear Quantum,Quantum Photonic Applications,Atomic Force Microscopy,Efficient Generation,Photolithography,Photoresist,Electron Beam Lithography,Atomic Layer Deposition,Silicon Nitride,Free Charge Carriers,Photonic Integrated Circuits,Ring Resonator,Quantum Key Distribution,Nonlinear Optical Materials,GaAs Substrate,Scalable Fabrication,Spontaneous Parametric Down-conversion,Bright Source,Wave Mixing
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