High-yield Large-Scale Suspended Graphene Membranes over Closed Cavities for Sensor ApplicationsSebastian Lukas,Ardeshir Esteki,Nico Rademacher, Vikas Jangra, Michael Gross,Zhenxing Wang,Ha-Duong Ngo,Manuel Baeuscher,Piotr Mackowiak, Katrin Hoeppner,Dominique J. Wehenkel,Richard van Rijn,Max C. LemmeACS Nano（2024）引用 1|浏览6关键词graphene,membrane,MEMS,pressuresensor,2D materialsAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
