Design and Modeling of a Microwave Plasma Enhanced Chemical Vapour Deposition System for Growth of Diamond Films
2024 IEEE International Conference on Plasma Science (ICOPS)（2024）
关键词
Chemical Vapor Deposition,Deposition System,Microwave Plasma,Chemical Vapor Deposition System,Heat Transfer,Finite Element Method,Aspects Of System,Navier Stokes Equations,Momentum Conservation,System Frequency,Finite Element Method Simulations,Use Of Barriers,Cylindrical Chamber,Precise Simulation,Heavy Transport,Plasma Chamber
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