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Enhanced Superconducting Qubit Performance Through Ammonium Fluoride Etch

Cameron J. Kopas,Dominic P. Goronzy, Thang Pham,Carlos G. Torres Castanedo,Matthew Cheng, Rory Cochrane, Patrick Nast,Ella Lachman,Nikolay Z. Zhelev, Andre Vallieres,Akshay A. Murthy,Jin-su Oh,Lin Zhou,Matthew J. Kramer,Hilal Cansizoglu,Michael J. Bedzyk,Vinayak P. Dravid,Alexander Romanenko,Anna Grassellino,Josh Y. Mutus,Mark C. Hersam,Kameshwar Yadavalli

MATERIALS FOR QUANTUM TECHNOLOGY（2024）

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Key words

superconducting qubits,two-level systems,fabrication,interfaces

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