Solid State Pulsed Power Modulator with Asymmetric Bipolar Pulse and High Repetition Rate for Semiconductor Manufacturing Process
IEEE Trans Ind Electron（2025）
关键词
Voltage,MOSFET,Silicon carbide,Transformers,High-voltage techniques,Modulation,Capacitors,Asymmetric bipolar pulse,high repetition rate,solid state pulsed power modulator (PPM)
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