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Unveiling the Secrets of Non-Evaporable Getter Films: Activation Temperature, Activation Time, and Achievable Activation Degree

Qingzhi Shi,Sihui Wang,Yongsheng Ma,Shiyuan Shi,Tao Huang,Fei Sun,Pengcheng Wang, Meitong Lu,Xiaoguang Zhao,Lixin Wang, Shuping Chen

JOURNAL OF ALLOYS AND COMPOUNDS（2024）

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Key words
Non-Evaporable Getter Film,Oxygen Atom Migration,Boundary Effect,Step Characteristic
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