Wafer-Scale ALD Synthesis of MoO3 Sulfurized to MoS2
CRYSTALS（2024）
关键词
silicon limitations,2D materials,Molybdenum disulfide (MoS2),Molybdenum trioxide (MoO3),atomic layer deposition (ALD),chemical vapor deposition (CVD),activation energy,scanning electron microscopy (SEM),X-ray photoelectron spectroscopy (XPS),Raman spectroscopy,atomic force microscopy (AFM),monolayer MoS2
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