Piezoresistance of Silicon Nanowires for Sensing Applications: Optimizing Nanowire Parameters from Electrical and Mechanical Perspectives
IEEE Access（2024）
关键词
Micromechanical devices,Noise measurement,Sensors,Resistance,Fabrication,Silicon,Stress,Piezoresistance,Nanowires,Silicon nanowires,Piezoresistive effect,surface depletion,sensor noise
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