Synthesis of Low-K SiONC Thin Films by Plasma-Assisted Molecular Layer Deposition with Tetraisocyanatesilane and Phloroglucinol

Gi-Beom Park,Hae Lin Yang, Ji Min Kim, Hyolim Jung,Geonho Baek, Chang-Kyun Park,Jin-Seong Park

Nanotechnology（2024）

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Key words

plasma-assisted molecular layer deposition (PA-MLD),low-k dielectrics,SiONC

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