Within-Chip Bridged-Pattern Short Detection Using Spatially Distributed Kerf Test Structures in 7nm FinFET Technology

C. Y. Lin, A. Ogino, C. H. Lee, Y. S. Bang,B. W. Jeong, D. U. Choi, S. Wu, Y. Xin, B. Walsh, C. Manya,J. Sim,M. Angyal

2024 IEEE 33RD MICROELECTRONICS DESIGN & TEST SYMPOSIUM, MDTS 2024（2024）

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关键词

Kerf Test Structure,Inline Scan Chain Latch,Within-chip Non-uniform Yield,Early Detection

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