Progress in Atomic Layer Deposited (cid:11) -Ga 2 O 3 Materials and Solar-Blind Detectors

F. Massabuau, J. Roberts,D. Nicol, P. Edwards, M. McLelland, G. Dallas, D. Hunter, E. Nicolson,J. Jarman,A. Kovács, R. Martin,R. Oliver,P. Chalker

semanticscholar（2021）

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