Universal Fourier Optics Model for Virtual Confocal Microscopes

Felix Rosenthal,Tobias Pahl, Tim Eckhardt,Sebastian Hagemeier, Jonas Compagnone, Tim Czasch, Michael Diehl, Richard Koops,Peter Lehmann

OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY III（2024）

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confocal microscopy,three-dimensional transfer function,surface topography measurement

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