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Non-contact Measurement of Dopant Depth Profile with Terahertz Emission Spectroscopy

Kenji Suzuki,Fumikazu Murakami,Inkeun Baek,Numata Mitsunori,Ingi Kim,Ryu Sungyoon,Shinji Ueyama,Yusin Yang,Masayoshi Tonouchi

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII（2024）

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Key words
Terahertz Emission Spectroscopy,TES,LTEM,Dopant profile,Carrier dynamics,Built-in electric field
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