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Feature Grouping to Enable Edge Placement Error-Aware Process Control in Multi-Feature Logic Use Case

Guillaume Schelcher, Marsil Athayde,Stijn Schoofs, Jeff Hsia, Zuan Khalik, Fahong Li, Konstantin Nechaev,Reza Sahraeian,Amir-Hossein Tamaddon,Victor Blanco,Stefan van der Sanden, Yichen Zhang,Roy Anunciado,Harm Dillen,Philippe Leray

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII（2024）

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关键词
EPE,Grouping,Optimization,Overlay,Logic
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