Development of Epitaxial SiGeB As a Test Vehicle to Evaluate Source-Drain Etchout During Channel Release of Gate-all-Around Devices: Topic/category: AEPM: Advanced Equipment Processes and Materials
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC（2024）
Key words
Epitaxial,Test Vehicle,Device Performance,Nanosheets,Goods Vehicles,X-ray Diffraction,Sheet Resistance,Secondary Ion Mass Spectrometry,Reciprocal Space Mapping
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