Reliable Cu Pillar Undercut Control Using the Endpoint Detection System

Zachary Gardner,Soon-cheon Seo, Pijeng Khor, Chris Waskiewicz,M. Sankarapandian,Eric Perfecto,James Demarest

2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC（2024）

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Detection System,Endpoint Detection,End Point,Energy Dispersive X-ray,Focused Ion Beam,Etching Rate,Cross-sectional Images,Small Form Factor,Flip-chip,Film Stack

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