Experimental Verification of Coupling Strength on the Mode-Localization in Single MEMS DETF Resonators and Its Application As a Force Sensor
IEEE Transactions on Electron Devices（2024）
Key words
Resonators,Couplings,Sensitivity,Micromechanical devices,Vibrations,Robot sensing systems,Frequency measurement,Double-ended tuning fork (DETF),force sensor,mechanical coupling,microelectromechanical systems (MEMS) resonator,mode-localization
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