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Comparative Study of DC, Unipolar and Bipolar Pulsed Electroplating Profile of Thick Gold Structures for MEMS Devices

Khushbu Raghav,Maninder Kaur, Anand Upadhyay,Amit Kumar,Deepak Bansal

JOURNAL OF ELECTRONIC MATERIALS(2024)

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Key words
Pulse plating,bipolar pulse plating,bone structure,diffuse layer,MEMS
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