Efficient Gradient Heating-Up Approach for Rapid Growth of High-Quality Amorphous ZrO2 Dielectric Films

Ao Chen,Zhihao Liang, Zhiying Liao, Huiqi Zhang, Songju Li, Ruihua Wang, Yan Li, Mengxia Yu,Xianzhe Liu,Honglong Ning, Aiping Huang,Jianyi Luo

Journal of Physics D Applied Physics（2024）

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Key words

amorphous ZrO2,gradient heating-up,high efficiency,low voltage,oxide TFT,low power consumption

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