Facile Routes to Enhance Doping Efficiency Using Nanocomposite Structures for High-Mobility and Stable PEALD-ITGO TFTs
Applied Surface Science（2024）
关键词
Plasma -enhanced atomic layer deposition,(PEALD),Indium tin gallium oxide (ITGO),Oxide semiconductor,ALD sub -cycle engineering,Thin-film transistors (TFTs)
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