3D Freeform Millimeter-Wave and THz Structures Based on Multi-Photon Lithography
2024 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION, OFC（2024）
Key words
Direct Laser Writing,Free-form Structures,Series Of Experiments,High Conductivity,Waveguide,Transmission Line,Metal Layer,Signal Source,Photoresist,Integrated Circuit,Deposition Technique,Surface Quality,Metal Deposition,Physical Vapor Deposition,Photonic Integrated Circuits,Substrate Plane,Coplanar Waveguide,Metal Strips,High-quality Surface,Polymer Template,Photonic Integration
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