CMOS Scaling for the 5 Nm Node and Beyond: Device, Process and Technology
Henry H. Radamson,Yuanhao Miao,Ziwei Zhou,Zhenhua Wu,Zhenzhen Kong,Jianfeng Gao,Hong Yang,Yuhui Ren,Yongkui Zhang,Jiangliu Shi,Jinjuan Xiang,Hushan Cui, Bin Lu,Junjie Li,Jinbiao Liu,Hongxiao Lin,Haoqing Xu, Mengfan Li, Jiaji Cao, Chuangqi He, Xiangyan Duan,Xuewei Zhao,Jiale Su,Yong Du,Jiahan Yu,Yuanyuan Wu,Miao Jiang,Di Liang,Ben Li,Yan Dong,Guilei Wang Nanomaterials（2024）
关键词
CMOS,process integration,nanoscale transistors,FDSOI,GAA,TFET
AI 理解论文
溯源树
样例
