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Low Temperature (002)-Oriented Zinc Oxide Films Prepared Using Ozone-Based Spatial Atomic Layer Deposition

Wen-Bin Wu,Chia-Hsun Hsu, Xin-Xiang Yue, Wen-Zhi Zhang,Jing Zhang,Xiao-Ying Zhang,Peng Gao,Wan-Yu Wu,Dong-Sing Wuu,Feng-Min Lai,Shui-Yang Lien

CERAMICS INTERNATIONAL（2024）

引用 0|浏览15
关键词
Spatial atomic layer deposition,Zinc oxide,Crystalline orientation,Ozone
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