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Study of Amorphous Layer on CVD Diamond Surface Induced by Ga Ion Implantation in Focused Ion Beam Processing

Guangjun Jia,Guoxin Chen,Lei Zhang,Junfeng Cui, Beichen Duan, Boxiang Zhuang,Yutong Li,Huanming Lu,Nan Jiang,Kazuhito Nishimura,Peiling Ke

Diamond and Related Materials（2024）

Cited 1|Views28
Key words
Focused ion beam (FIB),CVD diamond,Ion implantation,Amorphous layers
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