Ablation Characteristics and Material Removal Mechanism of a 8-Ga2o3 Processed by Picosecond Laser
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING（2024）
Key words
Picosecond laser,Microchannels,LIPSS,Damage threshold
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined