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Correlation Between MBE Deoxidation Conditions and InGaAs/InP APD Performance

Zi-Lu Guo,Wen-Juan Wang,Hui-Dan Qu,Liu-Yan Fan,Yi-Cheng Zhu,Ya-Jie Wang,Chang-Lin Zheng,Xing-Jun Wang,Ping-Ping Chen,Wei Lu

JOURNAL OF INFRARED AND MILLIMETER WAVES（2024）

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Key words
molecular beam epitaxy,P/As exchange,heterointerface diffusion,InGaAs/InP APD
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