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Generating Spokes in Direct Current Magnetron Sputtering Discharges by an Azimuthal Strong-to-weak Magnetic Field Strength Transition

Martin Rudolph,Wahyu Diyatmika,Oliver Rattunde,Edmund Schuengel,Dmitry Kalanov,Jorg Patscheider,Andre Anders

Plasma Sources Science and Technology（2024）

Cited 0|Views14
Key words
direct current magnetron sputtering,magnetic field,cross-corner effect,spokes engineering,diocotron instability
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