THERMOREGULATION SYSTEM FOR BIOSENSORS BASED ON FIELD-EFFECT TRANSISTORS WITH A NANOWIRE CHANNEL

G. V. Nibudin,I. I. Tsiniaikin,G. V. Presnova,M. Yu. Rubtsova, A. A. Popov, P. O. Mikhailov,A. S. Trifonov,O. V. Snigirev,V. A. Krupenin,D. E. Presnov

Moscow University Physics Bulletin（2024）

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Key words

biosensor,nanowire,field-effect transistor,microchip,silicon on an insulator,electron-beam lithography,resistance temperature detector,thermal management,DNA

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