Design, Simulation, and Testing of a Tunable MEMS Multi-Threshold Inertial SwitchQiu Xu,Rodrigo T. Rocha,Yousef Algoos,Eric Feron,Mohammad I. YounisMicrosystems & Nanoengineering(2024)引用 5|浏览19关键词Nanomechanical testingAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要