Novel Dual Work Function Buried Channel Array Transistor Process Design for Sub-17 Nm DRAM

Dong-Sik Park, Dong-Hyun Im, Yun-Jung Kim, Sung Sam Lee, Byung-Jae Kang, Jae-Hong Seo, Taewoong Koo,Byoungdeog Choi

IEEE Access（2024）

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Key words

Dual work function-buried channel array transistor (DWF-BCAT),IAI,PNOF,HFWS

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