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Glass-Based Micro-Hotplate with Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow

Honglin Qian, Linxin Chen, Haotian Dai,Fanhong Chen,Shuai Liu,Xiaohui Du,Shuo Gao,Yonggang Jiang,Bing Li,Minjie Zhu,Gaopeng Xue

Journal of microelectromechanical systems（2024）

引用 0|浏览14
关键词
Glass-based micro-hotplate,anodic bonding,glass thermal reflow,low power consumption,TGV
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