Highly Reliable Nanoelectrothermal Non-Volatile Memory with CMOS-level Voltage and Low On-State Resistance
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)（2024）
Key words
Nanoelectromechanical (NEM) non-volatile memory,High reliability,Complementary metal-oxide-semiconductor (CMOS)-level voltage,Low contact resistance
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