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A MEMS Fast Steering Mirror with 10 Mm Aperture for Free-Space Optical Communication

Yichen Liu,Yongquan Su, Zhichao Weng,Yi Yang,Yang Wang,Lihao Wang,Zhenyu Wu

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)（2024）

Cited 1|Views16
Key words
MEMS Fast Steering Mirror,Piezoresistive Sensor,Quasi-Static,Free-Space Optical Communication
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