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Structure and Properties of a HfNbTaTiZr Cathode and a Coating Formed Through Its Vacuum Arc Evaporation

Bulletin of the Russian Academy of Sciences Physics(2024)

Cited 1|Views6
Key words
high-entropy alloy,vacuum arc deposition,HfNbTaTiZr,nanocrystalline structure,phase state,elemental composition,hardness,wear resistance
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