Graphene-All-Around Cobalt Interconnect with a Back-End-of-Line Compatible Process.
NANO LETTERS(2024)
Key words
Co interconnects,graphene-all-around,BEOLcompatible,electromigration,reliability
AI Read Science
Must-Reading Tree
Example

Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined