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Differential Characteristics of the Particles Sputtered by Gas Cluster Ions at Elevated Temperatures. Molecular Dynamics Simulation

A. E. Ieshkin,A. V. Nazarov, D. R. Bessmertniy, I. N. Kutlusurin,A. A. Shemukhin

VACUUM（2024）

Cited 0|Views2
Key words
Cluster ions,Sputtering,Thermal spike,Molecular dynamics,Temperature effects
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