Low Resistance Ohmic Contact of Multi-Metallic Mo/Al/Au Stack with Ultra-Wide Bandgap Ga2O3 Thin Film with Post-Annealing and Its In-Depth Interface Studies for Next-Generation High-Power Devices
SURFACES AND INTERFACES（2024）
关键词
Ultra-wide bandgap,Gallium oxide,Power devices,Ohmic contact,Interface study,Contact resistance
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