Response Optimization of LiNbO3 Ultrasonic Transducers for High Temperature Measurement

Xiaomei Zeng,Vasiliy O. Pelenovich, Xiangyu Zhang,Chang Xu, Yue Ding, Zheng Wang,Zhiwen Chen,Jun Zhang,Bing Yang,Alexander Pogrebnjak,Sheng Liu

IEEE SENSORS JOURNAL（2024）

引用 1|浏览27

关键词

Temperature measurement,Ultrasonic variables measurement,Transducers,Surface treatment,Sensors,Substrates,Scanning electron microscopy,LiNbO3,RF magnetron sputtering,temperature sensor,thin film,ultrasonic transducer

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